JPH02136063U - - Google Patents
Info
- Publication number
- JPH02136063U JPH02136063U JP4519989U JP4519989U JPH02136063U JP H02136063 U JPH02136063 U JP H02136063U JP 4519989 U JP4519989 U JP 4519989U JP 4519989 U JP4519989 U JP 4519989U JP H02136063 U JPH02136063 U JP H02136063U
- Authority
- JP
- Japan
- Prior art keywords
- growth
- reaction tube
- cooling chamber
- boat
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 14
- 238000006243 chemical reaction Methods 0.000 claims description 10
- 239000007791 liquid phase Substances 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4519989U JPH02136063U (en]) | 1989-04-18 | 1989-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4519989U JPH02136063U (en]) | 1989-04-18 | 1989-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02136063U true JPH02136063U (en]) | 1990-11-13 |
Family
ID=31559164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4519989U Pending JPH02136063U (en]) | 1989-04-18 | 1989-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02136063U (en]) |
-
1989
- 1989-04-18 JP JP4519989U patent/JPH02136063U/ja active Pending
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